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PFA coating for semiconductor manufacturing equipment

High purity and low particle characteristics excellent surface treatment PFA coating

In the semiconductor manufacturing field, strict requirements are demanded not only for chemical resistance but also for low particle generation, non-contamination, and high purity. PFA coatings not only excel in chemical and heat resistance but also form dense and defect-free films, which help suppress the permeation of chemicals and gases, contributing to the reduction of particle generation and ion leaching risks. Due to these characteristics, they are widely used for surface treatment of semiconductor manufacturing equipment and related components. They are particularly noted for their ability to maintain stable performance even in environments that require high reliability. We can also provide proposals for optimal specifications and evaluation tests tailored to applications and usage conditions, so please feel free to contact us for technical consultations and prototype verifications.

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  • Surface treatment contract service
  • PFA coating for equipment

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